ANALYSIS OF AN INVERSE PROBLEM ARISING IN PHOTOLITHOGRAPHY
نویسندگان
چکیده
منابع مشابه
Analysis of an Inverse Problem Arising in Photolithography
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ژورنال
عنوان ژورنال: Mathematical Models and Methods in Applied Sciences
سال: 2012
ISSN: 0218-2025,1793-6314
DOI: 10.1142/s0218202511500266